Microelectromechanical system is a promising technology with many applications.
微电子机械系统是一项有广泛应用前景的实用技术。
Application of Microelectromechanical Systems (MEMS) in phased array antenna is discussed in this paper.
主要讨论了微电子机械系统(MEMS)在相控阵天线中的应用。
Microelectromechanical systems integrate moving mechanical elements, sensors and electronics on pieces of silicon.
微型机电系统将活动的机械部件、传感器和硅片上的电子电路集成在一起。
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