The operating principle and flow characteristic of micro valveless pump were introduced.
介绍了无阀型微泵的特点及其工作原理；
In this dissertation, only the piezoelectric bimorph micro-actuator and valveless piezoelectric micro pump are introduced.
本文的研究重点是压电双晶梁微驱动器和无阀压电微泵。
Piezoelectric valveless micro-pump theoretical analysis, prototype preparation and its performance are studied.
无阀压电微泵的理论分析、样机制备及其性能测试。
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