The forming mechanism of different micro structures fabricated by micro electrical discharge machining (EDM) deposition was studied.
对微细电火花沉积加工中沉积所得不同微细结构的成形机理进行了研究。
Mechanical properties of thin films are important parameters for MEMS technologies, and affect the research and the use of micro structures.
薄膜力学性能是当今MEMS技术中一个很重要的参数，对于微结构器件的研究和应用有很大的影响。
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