Industry Equipment: Electric Valve, Actuator, Micro Pumps.
工业设备:阀门,致动器,水泵,气泵,液泵,油泵。
Now, there is a lot of research on micro pumps but little on micro motors overseas, and there is no research on both in our country.
目前,国际对电水动力微泵的研究较多,对电水动力微马达的研究甚少,而国内研究对电水动力微泵、微马达的研究尚属空白。
In chapter 1, the back ground of MEMS was introduced, and research status of micro pumps and micro motors was analyzed, and the targets and contents of our work were described.
第一章介绍了微机械电子系统这一大背景的研究现状,分析了电水动力驱动的微泵、微马达研究现状,阐明了电水动力微马达的研究目标及研究内容。
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