... Micro Laser Machining 微雷射加工 Micro Nano Machining 微纳加工 Micro Structure Machining 微结构加工 ...
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A novel MOEMS spatial resonator based on micro-nano machining technology was put forward. The principle and structure of the resonator were introduced.
提出了一种新颖的基于微纳米加工技术的MOEMS空间谐振腔结构,介绍了其工作原理和系统构成。
Scanning probe microscope (SPM) is used not only for measuring the micro profiles of surfaces, but also for nano ultraprecise machining and atom manipulation now.
扫描探针显微镜(SPM)现在不仅用于表面微观形貌的检测,同时也用于纳米超精密加工和原子操纵。
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