A novel MOEMS spatial resonator based on micro-nano machining technology was put forward. The principle and structure of the resonator were introduced.

提出了一种新颖的基于微纳米加工技术的MOEMS空间谐振腔结构，介绍了其工作原理和系统构成。

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Scanning probe microscope (SPM) is used not only for measuring the micro profiles of surfaces, but also for nano ultraprecise machining and atom manipulation now.

扫描探针显微镜(SPM)现在不仅用于表面微观形貌的检测，同时也用于纳米超精密加工和原子操纵。

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