micro electro mechanical technology 微电子机械技术
micro mechanical manufacturing technology 微机械制造技术
Micro Electro Mechanical System (MEMS) is a course of new technology rising in recent years. Micro planetary gear reducer is the important part in MEMS.
微机电系统(MEMS)是近年来兴起的一门新兴技术，微行星齿轮减速器是微机电系统中的重要器件。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
As a kind of MEMS actuators, micro mechanical radio frequency switch is a representational structure of micromechanical technology, and basis of many micro mechanical components.
微机械射频开关作为MEMS执行器的一种，是微机械技术中的一类有代表性的结构，是很多微机械器件的基础。
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