A new optical interferometer suitable for using in the scanning force microscope is presented. The cantilever itself is used as a micro interferometer element.
目前在扫描力显微镜中经常用到的氮化硅三角形探针本身可以作为一个基于点微射干涉的微干涉元件。
The system comprises low frequency-difference two-frequency laser interferometer measuration module, micro-detection device and two dimension platform.
系统由低频差双频激光干涉度量模块和微探头及二维工作台两部分组成。
A fiber Fizeau interferometer for measurement of micro-vibration of MEMS devices is presented, which is simple in configuration and easy to operate.
提出一种结构简单、使用方便的用于微电子机械部件运动状态测量的光纤斐索干涉装置。
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