... 微型加速度计(Micro Accelerometer) 微型陀螺(Micro Gyroscope) 微型触觉传感器(Micro Tactile Sensors) ...
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微陀螺；起支；PI控制；模糊自整定 [gap=1634]Key words: electrostatically suspension； microgyroscope； initial levitation； PI control； fuzzy
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electrostatically levitated micro-gyroscope 静电悬浮微陀螺
micro-gyroscope 微陀螺
micro gyroscope damping 微陀螺阻尼
silicon micro-gyroscope 硅微陀螺仪
Vibratory micro-gyroscope 振动式微陀螺
Design of micro gyroscope 微陀螺设计
micro-fluid gyroscope 微流体陀螺
silicon micro-machined gyroscope 硅微陀螺
Micro-Optical Gyroscope 微光学陀螺
Grounded on the initial ASIC of micro gyroscope of MEMS center, single ended sense circuit is improved to differential sense circuit. And the important block trans-resistrance amplifier of self-excitated drive circuit is designed.
本文首先分析了振动式微机械陀螺的工作原理,在哈工大MEMS中心原有微陀螺ASIC电路的基础上,将单端检测改进为差分检测,并设计了自激驱动电路中的重要模块跨阻放大器。
参考来源 - 微机械陀螺中全差分放大器的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
The structure can reduce the parasitic capacitance of the sensor, improve the negative resistance characteristics of the sensitive film, and be used in micro gyroscope.
该结构降低了器件的寄生电容，改善了敏感薄膜的负阻特性，适用于共振隧穿效应陀螺。
The orthogonal coupling error, non-linear of the drive mode, temperature effect and parasitic capacitance of a fully-symmetrical micro gyroscope are test and analyzed in this paper.
本文针对一种全对称微机械陀螺，对其正交耦合误差、驱动非线性、温度特性以及寄生电容来源进行了测试与分析。
MiraMEMS Sensing Technology Co. , Ltd focuses on the development and production of micro-motor sensor products, including the accelerometer, gyroscope and electronic compass.
明镐电子专注于微电机传感器件的研发和生产，产品包括加速度传感器、陀螺仪和电子罗盘。
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