The principle of projection type micro optical encoder has been described and the optics theory of grating imaging is deduced.
对投影型微光学编码器的原理进行了分析,结合微机电系统集成技术,提出并实现了投影型微光学编码器。
Incremental motion encoder (IME) is a new type of transducer for shaft center trace measurement with resolution up to sub-micro.
运动增量编码器(IME)是一种新型的轴心轨迹测量传感器,其测量灵敏度可以达到亚微米级。
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