The loading effect of sensors is often an inevitable problem in micro-electromechanical systems(MEMS).
传感器对被测对象的负荷效应是微机电系统中不可忽视的一个问题。
With the development of micro-electromechanical systems, non-silicon materials have been widely used in MEMS.
随着MEMS器件的广泛研究和快速进步，非硅基材料被广泛用于MEMS器件中。
Electrochemical actuators have promising potential applications in the fields of micro-electromechanical systems (MEMS) and biomechanical biomedicine.
电化学驱动器在微电子制造系统(MEMS)和生物医疗领域都有广泛的应用前景。
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