The sensor bases on micro electromechanical systems (MEMS) technology and modern transducer technology.
本传感器基于微机电系统(MEMS)技术和传感技术，利用半导体加工工艺在硅基底上制作。
参考来源 - 基于MEMS技术的微型电场传感器设计及实验研究·2,447,543篇论文数据，部分数据来源于NoteExpress
MEMSIC, a micro-electromechanical systems and sensor manufacturer, plans to offer Mote Runner on its popular IRIS sensor.
微机电系统和传感器制造商MEMSIC，正计划在其IRIS 传感器上使用 Mote Runner。
The loading effect of sensors is often an inevitable problem in micro-electromechanical systems(MEMS).
传感器对被测对象的负荷效应是微机电系统中不可忽视的一个问题。
With the development of micro-electromechanical systems, non-silicon materials have been widely used in MEMS.
随着MEMS器件的广泛研究和快速进步，非硅基材料被广泛用于MEMS器件中。
应用推荐