中科院上海 微系统所凭借其在微系统和微型机电系统（Micro Electromechanical System，MEMS） 技术方面良好的基础，自从1998 年就对无线传感器网络进行了跟踪和研究，已经通过 系统集成的方式完...
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Micro ElectroMechanical System MEMS 微机电系统
micro-electromechanical system 微电子机械系统 ; 微机电加工技术
micro electromechanical system packaging 微机电系统封装
micro-electromechanical system code lock 微机电系统密码锁
micro-electromechanical system infrared radiation source 微机电系统红外光源
Micro electromechanical system (MEMS) is a kind of high technology with which people understand and change the objective world from microscopic view.
微机电系统已成为人们从微观角度认识和改造客观世界的一种高新技术。
A DC-contact series radio frequency(RF) micro electromechanical system(MEMS) switch with slanting beams was developed to eliminate warping of the cantilever beam due to residue stresses.
为解决悬臂梁结构的射频微机电系统开关在残余应力的作用下会发生翘曲的问题，提出在悬臂梁的顶端引入斜拉梁的方法。
Micro motors, one of the important devices in the micro electromechanical system, are discussed, including electrostatic micro-motors, electromagnetic micro-motors and ultrasonic micro-motors.
介绍了微电子机械系统中的关键执行部件——超微电机，包括静电型微电机、电磁型微电机、超声波微电机等。
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