A hair cell vector hydrophone based on micro electro mechanical system (MEMS) was presented in this paper.

提出了一种纤毛式微机电系统(MEMS)矢量水声传感器的仿生组装技术。

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Micro Electro Mechanical System (MEMS) is a course of new technology rising in recent years. Micro planetary gear reducer is the important part in MEMS.

微机电系统(MEMS)是近年来兴起的一门新兴技术，微行星齿轮减速器是微机电系统中的重要器件。

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MEMS (micro electro mechanical system) is a new field which has a lot of advantages: small volume, light weight, low energy consumption, fast response, big batch and low cost etc.

微型机电系统是一个新兴的技术领域，其主要优点是体积小、重量轻、能耗少、响应快、大批量、成本低等，有广泛的应用前景。

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