The main special machine tools and equipment for micro EDM are introduced as well.
扼要介绍了国外主要的微细电火花专用机床与设备。
This paper analyses the micro EDM feasibility for semiconductor silicon from the physical properties of silicon.
从硅材料的物理性能出发，分析其微细电火花加工的可行性。
In order to use electro discharge machining (EDM) technology to manufacture micro-machines, analyzed the key technologies of micro EDM, and developed a micro EDM machine tool.
为了将电火花加工技术应用到微机械制造中，分析了微细电火花加工中的关键技术，开发了微细电火花加工机床。
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