micro-cantilever 微悬臂梁
bi-material micro-cantilever array 双材料微悬臂梁阵列
micro cantilever probe 探针悬臂梁
micro-cantilever valve 悬臂梁微型阀
micro-cantilever probes 微悬臂梁探针
micro-cantilever sensors 微悬臂梁式传感器
silicon micro-cantilever 硅微机械悬臂梁
A silicon micro cantilever structure with piezoeLectric thick film was designed for low frequency operations.
设计了一种硅微悬臂梁结构，在低频环境中以压电厚膜进行信号转换、谐振。
A new digital method based on FPGA was introduced in this paper to amplify the quality factor of micro cantilever.
本文提出一种基于FPGA的数字式提高微悬臂梁品质因数的方法。
The structure of micro cantilever bridge, the photolithographic mask and the circuit system of the sensor is designed.
从理论上阐述了微悬桥结构气体流速传感器的工作原理，设计了微悬桥的结构、工艺版图以及其电路系统。
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