In the second chapter, the functions and the capabilities of the micro-vibration platform were set down.
第二章提出了微振动平台所应具备的各项功能，评估了微振动平台要达到的主要性能指标。
A fiber optic micro-vibration sensor based on optical fiber resonance principle is designed and fulfilled.
利用光纤共振原理设计和实现了一种光纤微振动传感器。
A fiber Fizeau interferometer for measurement of micro-vibration of MEMS devices is presented, which is simple in configuration and easy to operate.
提出一种结构简单、使用方便的用于微电子机械部件运动状态测量的光纤斐索干涉装置。
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