Using the KOH anisotropy enchant the vertical micro mirror array is fabricated. And also, the result of experiment is analyzed and discussed.

使用KOH各向异性腐蚀液制作了垂直微反射镜阵列，并对实验结果进行了分析和讨论。

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MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.

提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。

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This article describes the vertical and cross feed mechanism for both metric and inch system. It is able to perfom automatic, rapid travelling and micro feed.

本文论述垂直和横向进给量的公制与英制共用机构，自动快速移动和自动微量进给机构。

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