A novel MOEMS spatial resonator based on micro-nano machining technology was put forward. The principle and structure of the resonator were introduced.
提出了一种新颖的基于微纳米加工技术的MOEMS空间谐振腔结构，介绍了其工作原理和系统构成。
Based on the analysis of structure of micro-base-parts, drew up a detailed route of the complete machining process.
在对微小型座体零件结构分析的基础上，制定了基于车铣加工技术、以实现完整加工为目标的详细加工工艺路线。
Micro 3D structure machining with simple shaped electrode can't generally apply the method of common mechanical milling for the reason of electrode wear, Machining conditions and etc.
针对三维金属微细结构的微细电火花加工，应用等损耗理论，采用分层加工的方法，建立了单道加工时底面形状随电极损耗而变化的轮廓模型。
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