表面技术 关键词]：过硫酸氢钾复合盐; 微蚀刻;过硫酸钠;PCB [gap=751]Key words] Potassium monopersulfate; Micro-etch; Sodium persulfate; PCB
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The business unit's capabilities including photolithography, micro-etch and small scale thermal dissipation technology.
该业务部门的技术能力包括照相平版印刷、微蚀刻和小规模散热技术。
In the paper, effects of brown oxide process parameters on micro-etch rate, surface topography, surface roughness, binding strength were analyzed through the experiment.
本文分析了棕化工艺参数对微蚀速率、表面形貌 、表面微观粗糙度、结合力的影响 。
It is proved that the uniformity of etch rate can be improved and the effect of micro load can be decreased by adjusting the value of chamber pressure, gas flow rate and RF power properly.
结果表明，通过对反应室压力、刻蚀气体流量和射频功率的调节，可以降低微负载效应的影响，得到良好的刻蚀均匀性。
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