Micro-structures are a few typical elements of micro-electromechanical system (MEMS). The physical dimensions, motion characteristics, material and mechanical properties have important influences on the system performance of MEMS device.
微结构是微机电系统的基本元件，其几何尺寸、运动特性、材料及力学特性直接影响微机电系统的整体性能。
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The micro-electromechanical system (MEMS) technology is adopted to fabricate the substrate-free bi-material micro-cantilever arrays.
采用微细加工技术制作出无基底的双材料微悬臂梁阵列结构。
The connection part is connected with the stress dispersion structure and a basal plate of the micro-electromechanical system device.
以及一连接部，连接该应力分散结构及该微机电系统装置的一基板。
The LCR-100 Gyrocompass AHRS is a north finding attitude and heading reference system based on a state-of-the-art fibre-optic gyro and micro-electromechanical (MEMS) accelerometers.
LCR - 100罗经ahrs系统是寻北姿态航向参考系统，基于最先进的光纤陀螺和微机电(MEMS)加速度计。
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