precision micro-worktable 精密微动工作台
micro-motion worktable 微动工作台
Micro Motion Worktable 微动工作台
micro displacement worktable 微动工作台
micro-displacement worktable 微位移工作台
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The principle, structure, design and calculating methods on micro displacement worktable with three degrees of freedom supported by elastic guides are presented.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
The micro-motion worktable is the important part in micro-mechanical systems and the key component to achieve high-precision positioning.
微动工作台是微机械系统的重要组成部分，是实现高精度定位的关键部件。
This paper presents the construction method and characteristic error calculation of the elastic leaf spring guide in a micro displacement worktable.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
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