The micromachining process like photolithograph, electroplate and sputtering etc is adopted to fabricate the stator of MGELR.
采用了光刻、电镀、溅射等微细加工工艺制造了MGELR的定子。
Micromachined gyroscope with electromagnetically levitated rotor (MGELR) is a new kind of an-gular rate sensor, which has the same working mechanism as traditional mechanical gyroscope.
电磁悬浮转子微陀螺（MGELR）是一种新型的角速率传感器，它和传统机械陀螺具有相同的工作机理。
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