... 计量光栅 metrology grating 计量实验室 metrology laboratory 边耶硬度；边氏硬度 Meyer hardness ...
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metrology grating disk 计量图光栅
Metrology grating technique 计量光栅技术
grating metrology system 衍射光栅计量系统
This paper presents a new non-contact displacement sensor with diffraction grating metrology system based on an improved Foucault focus detection method.
本文介绍了一种新型的基于改进傅科聚焦探测法且自带衍射光栅计量系统的非接触式位移传感器。
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