Inductors were defined by electron-beam lithography and formed by depositing micron-thick aluminium metal onto the wafers.
用电子束刻蚀法在晶片上镀上纳米级铝层形成了电感器。
Next, a mixture of two polymers is added to the metal substrate to create patterns, a process known as diblock copolymer lithography (BCP).
接下来，在金属基板上添加一种由两种聚合物组成的混合物来制作样品，这个工艺过程被称为嵌段共聚物光刻(BCP)。
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