基于mems技术的 based on mems technology ; mems-based

MEMS测试技术 MEMS measuring technique

基于MEMS的显示技术 MEMS based display technology

硅基MEMS制造技术 Silicon-based MEMS fabrication technology

MEMS制造技术 manufacturing technology of MEMS

MEMS工艺技术 MEMS processing technology

mems加工技术 mems micromachining technology