MEMS packaging technology 微机电系统的封装技术
mems system packaging mems系统封装
packaging of MEMS 体硅键合技术
NanoGetters for MEMS hermetic packaging 用于MEMS真空封装中的纳米吸气剂
This paper introduces the classes, particularities and basic demands of RF MEMS packaging.
本文介绍了RF MEMS封装的分类、特殊性和基本要求。
Based on serial port communication, a sort of long-distance control applications of MEMS packaging by laser was introduced.
介绍一种基于串口通信，激光封装MEMS芯片的远程控制应用方案。
The COF/MEMS packaging technology is well-suited for many microsystem packaging applications such as micro-optics and radio frequency(RF) devices.
COF/MEMS封装技术非常适合于诸如微光学及无线射频器件等很多微系统封装的应用。
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