MEMS MEMS(微机电系统) (微机电系统)是指集微型传感器、 是指集微型传感器、 执行器以及信号处理和控制电路、接口电 执行器以及信号处理和控制电路、...
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By the research for MEMS and the MEMS acceleration sensor, This assignment will finish a series of MIMU system, which will be applied to the rocket and the missile guided system.
该课题希望通过对MEMS技术和MEMS惯性传感器的研究,研制和设计出一系列能够应用于火箭和导弹制导的MIMU系统。
In order to improve the efficiency for coupled electromechanical analysis of MEMS system, a new efficient numerical approach for electrostatic MEMS with small deformations is presented.
为了提高微机电系统中静电-结构耦合数值计算速度,提出了一种新的针对微结构小变形的静电-结构耦合高效率数值计算方法。
At last, the trends of MEMS and MEMSpackaging are prospected, and the integrated MEMS system packaging is discussed.
最后对MEMS和MEMS封装的走向进行了展望,并对全集成MEMS系统的封装进行了一些探讨。
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