This paper reviews the techniques and applications of diamond MEMS devices.

本文主要综述了金刚石MEMS器件的技术和应用。

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The invention can be applicable to various MEMS devices with deformable beams.

本发明可应用于多种带有变形梁的MEMS器件中。

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MEMS devices with minimum volume and cost were realized by the embedded CMOS process.

通过这种嵌入式CMOS工艺技术，可以实现具备最小体积、最低成本的MEMS器件。

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The company is currently the largest MEMS supplier for consumer devices globally.

FORBES: Chipmaker STMicroelectronics Sees Big Opportunity In Micro Sensors

These physical devices come in a variety of configurations that include various combinations of MEMS motion sensors, motion processors, and appropriate APIs.

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Indeed, last year, Knowles Acoustics of Itasca, Illinois, which has been making MEMS microphones since 2003, became the first manufacturer to have shipped a billion of the devices.

ECONOMIST: Noise-cancelling technology