Combining magnetron sputtering technology designs and makes membrane porous silicon sensor, it has good resistance and capacitance response when adsorbs alcohol.

结合磁控溅射技术设计制作了薄膜型多孔硅乙醇气敏元件，吸附乙醇时具有良好的电阻和电容响应。

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The success rate of porous conductive membrane preparation on fused silica capillary was greatly improved by control of voltage bias and electroosmosis effect.

通过控制电压偏置方向，利用电渗流效应使毛细管多孔导电膜的刻蚀成功率得到显著提高。

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An appropriate selection of electrode material and optimization of preparation technical skills of electrode porous membrane are very important to improve electric performances of AMTEC.

选择合适的电极材料，优化电极多孔薄膜的制备工艺，对改善AMTEC的电特性将是十分重要的。

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