These micro transducers can be integrated with signal conditioning and processing circuitry to form micro-electro-mechanical systems (MEMS) that can perform real-time distributed control.
这些微器件与信号调节和处理电路集成后,组成了可执行分布式实时控制的微电子机械系统(MEMS)。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Giant magnetostrictive thin films are very promising for micro-electro-mechanical systems (MEMS) as they combine high energy output, high frequency and remote control operation.
超磁致伸缩材料以其高能量输出、高操作频率、远程非接触式控制等特点广泛应用于各种微机械系统中。
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