A micron-precision optical alignment system is developed for three-dimensional Micro Electro-Mechanical System(MEMS) device fabrication based on multi-layer imprint lithography.
针对基于微压印成形三维MEMS器件制造工艺多层压印的需要，开发了一套基于视频图像对正原理的压印光刻对准系统。
The invention relates to a structure for increasing strength and service life of a deformable beam and an application thereof, belonging to the field of micro-electronic mechanical system (MEMS).
本发明涉及一种增加变形梁强度和使用寿命的结构及其应用，属于微电子机械系统(MEMS)领域。
Therefore, embedding nerve prosthesis prepared by micro electronic mechanical system (MEMS) technique as treatment for peripheral nerve damage has been dug deeper in animal and clinical study.
因此，应用微机电系统技术制备的可植入神经假体治疗周围性神经损伤疾病在动物研究和临床工作得到进一步的深入。
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