The basic working principle, structural composition of the device was introduced with focuses on structural design and processing technique of the micro-mechanical accelerometer.
介绍该装置的结构组成、基本工作原理，特别重点介绍了微机械加速度传感器的结构设计、加工工艺流程。
Potting is a key step for the packaging of high-g micro-electro-mechanical system(MEMS) accelerometer.
灌封是高量程微机械加速度计实用化的一个关键步骤。
The noise of capacitive micro accelerometer include mechanical thermal noise and electrical thermal noise;
电容式微加速度计的噪声包括机械热噪声和电热噪声；
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