The calculative method of the large field projection lithography lens is presented, and on the distortion measuring setup which is accomplished, distortion measurement of 8 inch wafer is completed.
提出了针对大视场投影光刻物镜畸变的计算方法，并在完成的畸变特性测量装置上进行了8英寸的硅片测量。
When measuring the leakage current with this setup, the voltage bias is applied to all the diodes simultaneously through the normally closed contact of each relay.
当利用这一配置测量漏流时，通过每个继电器的常闭触点同时向所有的二极管施加偏压。
This paper introduced a method for measuring Planck's constant using a bulb as a radiation source. The experiment setup used is simple and easily realizable.
介绍一种利用普通灯泡做辐射源测定普朗克常量的方法。该方法实验装置简单，易于实现。
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