A new laser interferometer method is presented and used to quick measurement of parallelism of optical flat.
文章提出了一种新的检测方法即用数字波面干涉仪检测平晶的平行度。
In this paper a new method and apparatus with laser measurement system for measuring parallelism and perpendicularity of large workpieces are discussed.
本文讨论了一种用于大型工件平行度、垂直度测量的新方法及其测量系统。
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