Results show that the change of power affects ions' bombardment on the substrate, and that of pressure lead to the change of the mean free path of the molecular.
结果表明，射频功率的改变直接影响到离子对衬底的轰击效应，而反应气压的改变影响气体分子的平均自由程。
The mean free path is calculated by the mean distance between the centers of your regions.
平均自由路径是由你的区域的中心之间的平均距离计算。
Gas flow in nanoscale space has distinct characteristics compared with that in conventional macro-scale, due to the influence of space dimension on gas mean free path.
纳米尺度下的气体流动具有不同于常规尺度的规律，其中重要的特征是纳米间隙中气体分子自由输运行程将减小，进而影响气体的输运规律。
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