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masterslave teleoperator system 主从遥操纵
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Compared with the conventional PID masterslave control method, the move mean difference is reduced by 18.2% and the move standard deviation is reduced by 61.5%, and the exposure effect can be ensured.
相对于传统PID主从同步控制方法,同步偏差的移动平均差减小18.2%,移动标准差减小61.5%,可以保证光刻机的曝光效果。
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