Thermal film air-mass sensor is one of this kind.
热式气体质量流量传感器就是其中的一类。
This task adopt MEMS technics to make Thermal -film air-mass sensor, mostly work is the study and facture of the sense organ of the chip.
本课题采用MEMS工艺制作热膜式气体质量流量传感器,主要工作放在敏感头芯片部分的研制。
Therefore, the application of the apodization IDT and the metal reflector are two important factors to improve the Q value of the SAW mass sensor.
因此,变迹idt和金属反射栅的应用是SAW质量传感器Q值的改善的两个重要因素。
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