Essay brief a few kind methods of correcting distortion of Scan Projection Mask Alignment System.
介绍了调整扫描投影式光刻机畸变的几种方法。
In synchrotron radiation X-Ray lithography, distortion of mask is caused by its initial tension, stress and inhomogeneous thermal effect.
在同步辐射X射线光刻中，由于掩模的初始张应力和掩膜的非均匀受热将使掩模产生热畸变。
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