The sensor is fabricated by traditional lithography and etching.

制作采用的是传统的光刻、刻蚀工艺。

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Using MEMS technics to process the silicon vibration element, in the process two side lithography and etching has being used many times.

介绍了旋转载体用硅微机械陀螺敏感元件的结构和利用双面多次光刻、腐蚀等微机械工艺加工得到硅振动单元的工艺过程。

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Some polymer materials are used as substrate. Kinds of new microfabrication technology are presented, including lithography, soft etching, LIGA, DEM and bonding, etc.

系统介绍了芯片实验室的各种制备技术，这些技术包括紫外光刻、软刻蚀、LIGA技术、DEM技术、键合等。

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The vertical transistor, however, does not rely on lithography and etching to define its gate length.

ECONOMIST: Transistors: A tall story | The

If this (topdown) manufacturing process is to be based on the most modern forms of deposition (including epitaxy), e-beam or ultra-deep UV lithography and precision etching, the mainstay of microelectronics and optoelectronics fabrication, then there are strict limits described below for which one-off fabrication is possible, but manufacture is not.

FORBES: Are There Physical Limits to Nanotechnology?