Nanoimprint is a high resolution, high throughput, low cost lithographic method.
纳米压印技术是一种高分辨率、廉价、高效的纳米结构制备技术。
Lithographic apparatus, device manufacturing method, and device manufactured thereby.
光刻装置,器件制造方法,以及由此制造的器件。
Lithographic apparatus, device manufacturing method, device manufactured thereby, and computer program.
平版印刷装置,器件的制造方法,由此制成的器件,和计算机程序。
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