Is a first article run prior to etching the lot to confirm etcher Settings and linewidths?
在批量蚀刻前是否进行首件与确认蚀刻机设备与线径？
Is a first article run prior to developing the lot to confirm developer Settings and linewidths?
是否在批量显影前做首件以确认显影设备与线径？
Increasing spectrum linewidths of laser sources and reducing bandwidths of signals can enhance CNR effectively.
增加激光光源谱宽和减少信号带宽可以有效地提高载噪比。
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