This paper overviews the application of laser interferometer in the precision analysis of semiconductor process equipment. The laser straightening effecting on linear measuring is introduced.
概述了激光干涉仪在半导体工艺设备精度分析领域的应用，简单介绍了光路准直对线性测长的影响。
Linear CCD is used as receiver on behalf of eyes on the basis of originally experimental equipment measuring the focal length of lens.
在原来光具座测量透镜焦距的装置基础上，用CCD代替人眼作接收器时，正确判定焦面是实验的关键。
Test result proved the precision of the equipment. It realizes measuring numbers and counting linear density of fibers automatically.
试验分析表明，测量精度达到设计要求，实现自动检测纤维根数和计算线密度值。
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