...可分为以下三种:体型微加工技术(Bulk micromachining)面型微加工技术(Surface micromachining)微光刻电铸造模技术(LIGA process) 体型微加工技术(Bulk micromachining)
基于20个网页-相关网页
Results show that nano-particle reinforced composite fabricated by LIGA process has high strength;
结果表明，LIGA复合技术得到的纳米颗粒增强镍基复合材料具有较高的强度；
LIGA process and the actualities of multiple masks technology, replication technology and contour polishing technology are introduced.
介绍了LIGA加工工艺以及多层掩模技术、复制技术、外形磨削成型技术的现状。
Making method of high deep-width rate, batch production of planar windings with LIGA process and silicon deep etching process is researched .
较深入地研究了以LIGA工艺、硅深刻蚀工艺为主的平面绕阻的高深宽比、批量化制作方法。
应用推荐