• 横向腐蚀 - 引用次数：1

  If the concentration of H_2O_2 is too high, the lateral etching will speed up and the hole contour will be distorted. If the concentration of H_2O_2 is too low, the reaction is very slow and no evident etching was observed.

  双氧水的浓度过高加快了横向腐蚀速率,使腐蚀孔边缘轮廓发生畸变,而浓度过低又会导致反应速度缓慢,腐蚀效果不明显。

  参考来源 - 半导体激光诱导液膜浸润刻蚀技术研究

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