The laser Positioning stage system with hoisting structure which is being developed is the main part of the Electron - beam Lithography Machine.
正在研制的激光定位吊装结构工作台系统是电子束曝光机的主要组成部分。
The lithography technique to fabricate the curved microlens array on the curved substrate by using laser direct writing system was also given.
文中给出了用激光直写设备在曲面基底上进行光刻来制作曲面微透镜阵列的方法。
In chapter four, the system design of Laser LIGA Lithography Apparatus and unit design are introduced.
第四章介绍了激光LIGA光刻实验装置的总体设计以及各单元部件的研制情况。
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