The aim of the thesis is to design a testing stagethat can simulate the dynamic and motional characteristics of photographicmachine, and thus provide a real model and hardware basis for the followingresearch in damping and isolating vibration.
论文的主要目标是设计出能模拟光刻机动力学特征和运动特征的隔振试验平台,为后续的隔振、减振研究提供实体模型和硬件基础。 而论文的主要内容则是设计试验平台的运动控制系统,使其按照原型光刻机的运动特性来运动。
参考来源 - 光刻机隔振试验平台运动控制系统设计与研究·2,447,543篇论文数据,部分数据来源于NoteExpress
Use two freedom vibration theory, base on impact has instant motion characteristic, use puncher example, study the isolating vibration design of impact base.
应用两自由度振动理论,根据冲击具有瞬态运动的特点,以冲床为例,研究冲击基础的隔振设计。
Engine mount is the isolator isolating vibration transmitted to operator cabin and foundation. The design quality for the mount has direct influence on comfort!
发动机悬置是隔离发动机振动向驾驶室和基础传递的隔振元件,其设计的优劣直接影响汽车的乘坐舒适性。
The results show that rigid material has a better effect than flexible one in isolating vibration, so the former should be selected as barrier material in engineering.
研究表明,刚性材料比柔性材料具有更好的隔振效果,在隔振设计时应选择刚性屏障材料;
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