abstract:Ion beam analysis ("IBA") is an important family of modern analytical techniques involving the use of MeV ion beams to probe the composition and obtain elemental depth profiles in the near-surface layer of solids. All IBA methods are highly sensitive and allow the detection of elements in the sub-monolayer range.
The mechanism of radiation damage effects on electronicdevicesand the applicationsofion beamanalysisin the investigations of radiation hardening were presentedin this paper.