...新技术及产品包含 ASYSTS新Satellite StockerTM,,它提供高效率的近工具的缓冲; 适用于高速,高通量材料处理在制程区内(Intra-Bay)和制程区间(Inter-Bay)的应用的Velocity HTC 传输带; ASYST新的VAO软件,为第一次允许晶圆厂过程和物质流实时可视化。
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