internal reactor characteristics
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Because of the complicated transport process and invisible characteristics, domestic researchers have carried out few explorations on internal flow and temperature distribution of the MOCVD reactor.
由于制备薄膜的反应器中气体流动具有复杂和不可观测的特点，国内对MOCVD反应器内部流场和温度场的研究只处在起步阶段。
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