The difference is measured using heterodyne interferometric technique and the edge is then positioned.
这一相位变化利用外差干涉技术测量,通过相位细分实现高精度的边缘定位。
参考来源 - 用于掩模板表面形貌测量的外差干涉显微系统的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
Described is an interferometric technique for accurately measuring three-coordinates in a relatively large space.
介绍一种在大型空间内精密测量三座标的干涉方法。
The laser optical feedback interferometric technique is reviewed as a general tool for remote sensing applications.
对基于激光回馈效应的传感应用研究进展进行了综述。
By using sinusoidal phase-modulating interferometric technique, the testing of fine displacement can achieve nanometer accuracy.
利用正弦相位调制干涉技术检测微小位移，精度可达纳米量级。
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